Scalable RF MEMS Switch Matrices: Methodology and Design

• Published in: IEEE transactions on microwave theory and techniques Vol. 57; no. 6; pp. 1612 - 1621
• Main Authors: King Yuk Chan, Daneshmand, M., Mansour, R.R., Ramer, R.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01-06-2009; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Applied sciences; Circuit properties; Design engineering; Design methodology; Design. Technologies. Operation analysis. Testing; Electric, optical and optoelectronic circuits; Electronic circuits; Electronics; Exact sciences and technology; Fabrication; Integrated circuits; Mathematical analysis; Matrices; Matrix methods; Micro- and nanoelectromechanical devices (mems/nems); Microelectromechanical systems; Microelectromechanical systems (MEMS); Micromechanical devices; Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits; Radio frequencies; Radio frequency; Radiofrequency microelectromechanical systems; RF MEMS; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; switch; switch matrix and monolithic microwave integrated circuits; Switches; Switching circuits; Switching, multiplexing, switched capacity circuits; Topology; Transmission line matrix methods; Wideband; Interconnection network; High performance; Scalability; Phase shift; RF systems; Implementation; switch; Microwave integrated circuits; RF MEMS; L shape; Wide band; Insertion loss; Connectedness; Microelectromechanical systems (MEMS); switch matrix and monolithic microwave integrated circuits; Selector switch; Monolithic integrated circuit; Microelectromechanical device
• ISSN: 0018-9480; 1557-9670
• DOI: 10.1109/TMTT.2009.2020839

This paper proposes new solutions for implementing wideband large switch matrices. These solutions are based on crossbar and L-shaped topologies. This paper introduces a high-performance wideband switch cell to build up scalable NtimesN switch matrices and gives an account of the design, fabrication, and characteristics of the switch cell and a 3times3 crossbar switch matrix. The chosen design procedure is seen to be appropriate since it produces valid measured results. In addition, this paper presents an RF microelectromechanical systems L-shaped switch matrix, which indicates less variation of characteristics for certain types of connectivity. It also demonstrates that for a 4times4 switch matrix, there is a 50% improvement in insertion loss and phase-shift variation.