Growth Modes of GaN Plasma-Assisted MBE Nanowires

Within this work we study the plasma-assisted molecular beam epitaxy of GaN on Si(111) substrate at different substrate temperatures and III/V flux ratios. We present the model, which gives the analytical expressions for the boundaries between the three growth modes: compact layer, nanowires, and ab...

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Bibliographic Details
Published in:Semiconductors (Woodbury, N.Y.) Vol. 52; no. 16; pp. 2085 - 2087
Main Authors: Berdnikov, Yu. S., Sibirev, N. V.
Format: Journal Article
Language:English
Published: Moscow Pleiades Publishing 01-12-2018
Springer
Springer Nature B.V
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Summary:Within this work we study the plasma-assisted molecular beam epitaxy of GaN on Si(111) substrate at different substrate temperatures and III/V flux ratios. We present the model, which gives the analytical expressions for the boundaries between the three growth modes: compact layer, nanowires, and absence of growth. We extract the activation energy for nucleation of GaN nanowires on the Si(111) from the model fitting to experimental data.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782618160042