Growth Modes of GaN Plasma-Assisted MBE Nanowires
Within this work we study the plasma-assisted molecular beam epitaxy of GaN on Si(111) substrate at different substrate temperatures and III/V flux ratios. We present the model, which gives the analytical expressions for the boundaries between the three growth modes: compact layer, nanowires, and ab...
Saved in:
Published in: | Semiconductors (Woodbury, N.Y.) Vol. 52; no. 16; pp. 2085 - 2087 |
---|---|
Main Authors: | , |
Format: | Journal Article |
Language: | English |
Published: |
Moscow
Pleiades Publishing
01-12-2018
Springer Springer Nature B.V |
Subjects: | |
Online Access: | Get full text |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Summary: | Within this work we study the plasma-assisted molecular beam epitaxy of GaN on Si(111) substrate at different substrate temperatures and III/V flux ratios. We present the model, which gives the analytical expressions for the boundaries between the three growth modes: compact layer, nanowires, and absence of growth. We extract the activation energy for nucleation of GaN nanowires on the Si(111) from the model fitting to experimental data. |
---|---|
ISSN: | 1063-7826 1090-6479 |
DOI: | 10.1134/S1063782618160042 |