Channel waveguides based on thermally co-evaporated Te–Ge–Se films for infrared integrated optics

• Published in: Journal of non-crystalline solids Vol. 377; pp. 205 - 208
• Main Authors: Vigreux, C., Vu Thi, M., Escalier, R., Maulion, G., Kribich, R., Pradel, A.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Oxford Elsevier B.V 01-10-2013; Elsevier
• Subjects: Condensed Matter; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Cross-disciplinary physics: materials science; rheology; Etching and cleaning; Exact sciences and technology; IR channel waveguides; Materials Science; Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of bulk materials and thin films; Physics; Physics of gases, plasmas and electric discharges; Physics of plasmas and electric discharges; Plasma applications; Reactive ion etching; Surface treatments; Telluride thick films; Thermal co-evaporation; Reactive ion etching; IR channel waveguides; Thermal co-evaporation; Telluride thick films; Integrated optics; Prototype; Thick films; Cladding; Thin films; Optical confinement; Optical transmission; Plasma etching; Waveguides; Absorption spectra; Vacuum evaporation
• ISSN: 0022-3093; 1873-4812
• DOI: 10.1016/j.jnoncrysol.2012.11.037

The feasibility of telluride based single-mode waveguides being able to guide light in the infrared region [1–16μm] is demonstrated. The rib waveguides comprise a silicon substrate, two Te–Ge–Se films deposited by thermal co-evaporation. The first one plays the role of a cladding layer while the second is the core layer. In order to control the light confinement, the second layer is further etched by reactive ion etching in CHF3/O2/Ar atmosphere. The obtained structures behaved as channel waveguides with a single-mode transmission demonstrated at 1.55μm. Transmission optical losses were evaluated by the cut-back method on the very first prototypes and were comprised between 0.6 and 1.8dBcm−1.
► The fabrication of single-mode channel waveguides based on TeGeSe films ► The TeGeSe films were deposited by thermal co-evaporation. ► The waveguides were made of a core and a cladding layer deposited onto silicon. ► The core layer was etched by reactive ion etching. ► The waveguides were characterized by propagation losses of 1.2±0.6dBcm−1.