Time-Dependent Airborne Organic Contamination on Silicon Wafer Surface Stored in a Plastic Box

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Bibliographic Details
Published in:	Japanese Journal of Applied Physics Vol. 42; no. Part 1, No. 4A; pp. 1575 - 1580
Main Authors:	Habuka, Hitoshi, Shimazaki, Yohei, Okamura, Shigeru, Sugimoto, Fumitoshi, Takeuchi, Takashi, Aihara, Masahiko, Shimada, Manabu, Okuyama, Kikuo
Format:	Journal Article
Language:	English
Published:	2003
Online Access:	Get full text
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ISSN:	0021-4922 1347-4065
DOI:	10.1143/JJAP.42.1575