Non-destructive Analysis of Buried Interfaces and Surface Layers: X-Ray Emission Spectroscopic Study
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Published in: | Japanese Journal of Applied Physics Vol. 42; no. Part 1, No. 7B; pp. 4756 - 4759 |
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Main Authors: | , , , |
Format: | Journal Article |
Language: | English |
Published: |
2003
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Online Access: | Get full text |
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Author | Hirai, Masaaki Kusaka, Masahiko Iwami, Motohiro Morii, Takashi |
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Author_xml | – sequence: 1 givenname: Motohiro surname: Iwami fullname: Iwami, Motohiro – sequence: 2 givenname: Masaaki surname: Hirai fullname: Hirai, Masaaki – sequence: 3 givenname: Masahiko surname: Kusaka fullname: Kusaka, Masahiko – sequence: 4 givenname: Takashi surname: Morii fullname: Morii, Takashi |
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Title | Non-destructive Analysis of Buried Interfaces and Surface Layers: X-Ray Emission Spectroscopic Study |
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