Non-destructive Analysis of Buried Interfaces and Surface Layers: X-Ray Emission Spectroscopic Study

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Published in:Japanese Journal of Applied Physics Vol. 42; no. Part 1, No. 7B; pp. 4756 - 4759
Main Authors: Iwami, Motohiro, Hirai, Masaaki, Kusaka, Masahiko, Morii, Takashi
Format: Journal Article
Language:English
Published: 2003
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Author Hirai, Masaaki
Kusaka, Masahiko
Iwami, Motohiro
Morii, Takashi
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  fullname: Hirai, Masaaki
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  givenname: Masahiko
  surname: Kusaka
  fullname: Kusaka, Masahiko
– sequence: 4
  givenname: Takashi
  surname: Morii
  fullname: Morii, Takashi
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Title Non-destructive Analysis of Buried Interfaces and Surface Layers: X-Ray Emission Spectroscopic Study
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