Non-destructive Analysis of Buried Interfaces and Surface Layers: X-Ray Emission Spectroscopic Study

Non-destructive Analysis of Buried Interfaces and Surface Layers: X-Ray Emission Spectroscopic Study

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Bibliographic Details
Published in:Japanese Journal of Applied Physics Vol. 42; no. Part 1, No. 7B; pp. 4756 - 4759
Main Authors: Iwami, Motohiro, Hirai, Masaaki, Kusaka, Masahiko, Morii, Takashi
Format: Journal Article
Language:English
Published: 2003
Online Access:Get full text
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Description
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.42.4756