Magnetic micro-actuators and systems (MAGMAS)

• Published in: IEEE transactions on magnetics Vol. 39; no. 6; pp. 3607 - 3612
• Main Authors: Cugat, O., Delamare, J., Reyne, G.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01-11-2003; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Applied sciences; Compatibility; Conductors; Electronics; Electrostatics; Exact sciences and technology; Magma; Magnetic analysis; Magnetic device characterization, design, and modeling; Magnetic devices; Magnetic materials; Magnetism; Magnetostriction; Microactuators; Microelectronics; Micromagnetics; Micromechanical devices; Permanent magnets; Scientists; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Electromagnetic actuators; Electromagnetic forces; Theoretical study; Electromagnetic force; Microactuators; microgenerators; MAGMAS; micro-actuators; scale reduction laws; MEMS; Current density; Magnetic device; Microelectromechanical device
• ISSN: 0018-9464; 1941-0069
• DOI: 10.1109/TMAG.2003.816763

Magnetic interactions provide outstanding performances for powerful integrated micro-actuators. This paper explains how magnetic interactions involving permanent magnets, currents, and various magnetic materials remain very effective and even improve as dimensions are reduced. The technological problems that have slowed the development of magnetic micro-actuators and systems (MAGMAS) are progressively being solved. As long as materials scientists continue to develop better thick-film patterned permanent magnets compatible with microsystem technologies, MAGMAS will have a promising future.