Air quality monitoring by means of sol–gel integrated tin oxide thin films

• Published in: Sensors and actuators. B, Chemical Vol. 58; no. 1; pp. 283 - 288
• Main Authors: Rella, R, Siciliano, P, Capone, S, Epifani, M, Vasanelli, L, Licciulli, A
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 21-09-1999
• Subjects: Air quality; NO 2 gases; Tin oxide thin film; Air quality; NO 2 gases; Tin oxide thin film
• ISSN: 0925-4005; 1873-3077
• DOI: 10.1016/S0925-4005(99)00090-8

Sol–gel pure and Pd-doped SnO
2 thin films on integrated substrates were developed to detect NO
2 and CO. PdO particles are included in the film matrix and their presence enhances the CO gas sensitivity and response time. Measurements of electrical conductivity showed that these films have a response variation higher than 1000% for NO
2 at temperatures in the range of about 200°C with a detection limit near 0.1 ppm, good for air quality monitoring. The response to CO is below 100% of the electrical variation but also in this case the sensor can detect very low concentration level.