Effect of Cu impurities on wet etching of Si(110): formation of trapezoidal hillocks

Effect of Cu impurities on wet etching of Si(110): formation of trapezoidal hillocks

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Bibliographic Details
Published in:New journal of physics Vol. 10; no. 1; p. 013033
Main Authors: Hynninen, Teemu, Gosálvez, Miguel A, Foster, Adam S, Tanaka, Hiroshi, Sato, Kazuo, Uwaha, Makio, Nieminen, Risto M
Format: Journal Article
Language:English
Published: IOP Publishing 25-01-2008
Online Access:Get full text
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Description
ISSN:1367-2630
1367-2630
DOI:10.1088/1367-2630/10/1/013033