A study by FTIR and mass spectroscopy of the decomposition of precursors for the MOCVD of high temperature superconductors

In this paper we report on a study by FTIR and mass spectroscopy of the gas phase thermal decomposition of [Y(TMHD) 3] for a temperature range 160–700 °C, and in the absence and presence of oxygen. Comparison of the results from both methods of analysis shows that the two techniques provide compleme...

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Bibliographic Details
Published in:	Journal of alloys and compounds Vol. 251; no. 1; pp. 297 - 302
Main Authors:	Hitchman, Michael L., Shamlian, Sarkis H., Condorelli, Guglielmo G., Chabert-Rocabois, Francoise
Format:	Journal Article
Language:	English
Published:	Elsevier B.V 01-04-1997
Subjects:	FTIR Gas phase thermal decomposition High temperature superconductors Mass spectroscopy Mass spectroscopy High temperature superconductors Gas phase thermal decomposition FTIR
Online Access:	Get full text
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Summary:	In this paper we report on a study by FTIR and mass spectroscopy of the gas phase thermal decomposition of [Y(TMHD) 3] for a temperature range 160–700 °C, and in the absence and presence of oxygen. Comparison of the results from both methods of analysis shows that the two techniques provide complementary information.
ISSN:	0925-8388 1873-4669
DOI:	10.1016/S0925-8388(96)02689-8