Syntheses of carbon nanomaterials by radio frequency plasma enhanced chemical vapor deposition

• Published in: Journal of alloys and compounds Vol. 486; no. 1; pp. 265 - 272
• Main Authors: Qi, J.L., Wang, X., Tian, H.W., Peng, Y.S., Liu, C., Zheng, W.T.
• Format: Journal Article
• Language: English
• Published: Kidlington Elsevier B.V 03-11-2009; Elsevier
• Subjects: Carbon; Catalytic processes; Chemical vapor deposition; Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.); Cross-disciplinary physics: materials science; rheology; Etching; Exact sciences and technology; Graphite; Materials science; Methods of crystal growth; physics of crystal growth; Methods of deposition of films and coatings; film growth and epitaxy; Nanomaterials; Nanoscale materials and structures: fabrication and characterization; Nanostructure; Nanostructures; Other topics in nanoscale materials and structures; Particulate composites; Physics; Plasma CVD; Plasma enhanced chemical vapor deposition; Radio frequencies; Theory and models of crystal growth; physics of crystal growth, crystal morphology and orientation; Catalytic processes; Nanostructures; Plasma CVD; Graphite; Methane; Nanoplate; Nanosheet; Etching; Radiofrequency; Carbon; Cobalt; Thin films; Composite materials; Fine particle; Growth mechanism; PECVD; Pretreatment; Nanostructured materials; Organic compounds
• ISSN: 0925-8388; 1873-4669
• DOI: 10.1016/j.jallcom.2009.06.122

We report a simple and effective method for syntheses of carbon nanomaterials, including a hybrid CNTs/cobalt particles shelled with graphitic layers, pure CNTs, a CNTs/carbon nanosheets (CNSs) composite and pure CNSs, on O
2-thermal etched Co substrate films, in discharging different mixed gases (CH
4/H
2, CH
4/H
2/O
2, CH
4/Ar and CH
4/Ar/O
2, respectively), using radio frequency plasma enhanced chemical vapor deposition (PECVD). Being etched by O
2 during the pretreatment stage, Co thin film transformed into small CoO particles and consequently the deoxidization of CoO particles may occur in PECVD process when different reactive gases are used to obtain various carbon nanomaterials. We find that the reactive gases govern the degree of how the CoO particles can be deoxidized and determine the final carbon nanomaterial products. In this work, the possible growth mechanisms for obtaining various carbon nanomaterials have been explored.