Periodic arrays of nanostructures in silicon and gallium arsenide by near-field enhanced laser irradiation in liquid precursors

• Published in: Colloids and surfaces. A, Physicochemical and engineering aspects Vol. 418; pp. 47 - 51
• Main Authors: Ulmeanu, M., Anghel, I., Filipescu, M., Luculescu, C., Enculescu, M., Zamfirescu, M.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 05-02-2013
• Subjects: acetone; Arrays; carbon tetrachloride; colloids; Femtosecond laser; gallium; Gallium arsenide; Irradiation; Lasers; Liquid precursors; Liquids; nanomaterials; Nanostructure; Near-field optics; Periodic arrays; Precursors; Si and GaAs nanostructures; silica; silicon; Silicon substrates; wavelengths; Femtosecond laser; Liquid precursors; Near-field optics; Si and GaAs nanostructures; Periodic arrays
• ISSN: 0927-7757; 1873-4359
• DOI: 10.1016/j.colsurfa.2012.11.002

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► Near field optics in liquid media was implemented to nanostructure Si and GaAs. ► Periodic arrays of ring, disk and convex bumps were obtained. ► Chemical composition of the nanostructures keep the composition of the substrates.
A simple approach to fabricate periodic arrays of ring bumps, disk and convex bumps or holes on silicon and gallium arsenide substrates is reported. In the process, a mono or double layer of 700nm diameter silica colloidal particles were self-assembled on the substrates and a single pulse from a 200fs laser at 387nm wavelength was applied. The surfaces were irradiated at normal incidence by immersing the substrates in a glass container filled with acetone, carbon tetrachloride and 1,1,2-trichlor-trifluorethan liquid precursors. The influence of the medium on the near-field interactions for both substrates is investigated.