Phase composition of Cr-C thin films deposited by a double magnetron sputtering system

• Published in: Surface and interface analysis Vol. 30; no. 1; pp. 544 - 548
• Main Authors: Groudeva-Zotova, S., Vitchev, R. G., Blanpain, B.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Chichester, UK John Wiley & Sons, Ltd 01-08-2000; Wiley
• Subjects: Cr-C films; Cross-disciplinary physics: materials science; rheology; Deposition by sputtering; Exact sciences and technology; magnetron sputtering; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; phase composition; Physics; Inorganic compounds; Electrical conductivity; Chromium carbides; Transition element compounds; XRD; Phase analysis; Experimental study; Microhardness; Film growth; Thin films; Magnetrons; Cathode sputtering; Quantity ratio; Wear resistance; SEM; X-ray photoelectron spectra
• ISSN: 0142-2421; 1096-9918
• DOI: 10.1002/1096-9918(200008)30:1<544::AID-SIA814>3.0.CO;2-7

Non‐reactive d.c. magnetron sputtering by two magnetron sources with inclined geometry was used for deposition of Cr–C thin films with C : Cr ratio in the range 0.08–2.40. The phase composition of the films was investigated by x‐ray diffraction, XPS, SEM and resistivity measurements. Four phase compositional regions were distinguished in the investigated large compositional range: films containing mainly microcrystalline Cr or Cr–C solid solution; films containing both the microcrystalline Cr phase and the stoichiometric Cr23C6 carbide phase (β‐phase); amorphous‐like films composed of the ultradisperse Cr crystalline phase and different metastable carbides; and amorphous films consisting of a carbon matrix with a limited amount of a high‐carbon carbide phase dispersed in it. The films from the first two regions exhibit very high microhardness and good wear resistivity, and at the same time a relatively low electrical resistivity, which make them promising coating materials for electronic applications. Copyright © 2000 John Wiley & Sons, Ltd.