A lithographic approach for quantum dot-photonic crystal nanocavity coupling in dilute nitrides

• Published in: Microelectronic engineering Vol. 174; pp. 16 - 19
• Main Authors: Pettinari, G., Gerardino, A., Businaro, L., Polimeni, A., Capizzi, M., Hopkinson, M., Rubini, S., Biccari, F., Intonti, F., Vinattieri, A., Gurioli, M., Felici, M.
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 25-04-2017; Elsevier BV
• Subjects: Band gap; Coupling; Crystals; Dilute nitrides; Dilution; Electron beam lithography; Energy gap; Holes; Hydrogen in semiconductors; Hydrogen storage; Hydrogenation; Photonic crystal structures; Photonic crystals; Quantum dots; Realignment; Semiconductors; Site-controlled QDs; Dilute nitrides; Hydrogen in semiconductors; Site-controlled QDs; Photonic crystal structures
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/j.mee.2016.12.003

We report on a novel lithographic approach for the fabrication of integrated quantum dot (QD)-photonic crystal (PhC) nanocavity systems. We exploit unique hydrogen's ability to tailor the band gap energy of dilute nitride semiconductors to fabricate isolated site-controlled QDs via a spatially selective hydrogenation at the nanometer-scale. A deterministic integration of the realized site-controlled QDs with PhC nanocavities is provided by the inherent realignment precision (~20nm) of the electron beam lithography system used for the fabrication of both QDs and PhC cavities. A detailed description of the fabrication steps leading to the realization of integrated QD-PhC cavity systems is provided, together with the experimental evidence of a weak coupling effect between the single-photon emitter and the PhC cavity.
[Display omitted]
•A fabrication strategy for quantum dot-photonic crystal integration is presented.•Spatial controlled hydrogen diffusion in dilute nitrides is used.•Weak coupling effect between single photon emitter and cavity are observed.