General three-dimensional image simulation and surface reconstruction in scanning probe microscopy using a dexel representation

• Published in: Ultramicroscopy Vol. 108; no. 1; pp. 29 - 42
• Main Authors: Qian, Xiaoping, Villarrubia, J.S.
• Format: Journal Article
• Language: English
• Published: Netherlands Elsevier B.V 01-12-2007
• Subjects: Atomic force microscopy; Dexel representation; Dilation; Erosion; Mathematical morphology; Scanning probe microscopy; Atomic force microscopy; Scanning probe microscopy; 82.20.Wt; Dilation; Dexel representation; Mathematical morphology; 83.85.Ns; 87.64.Dz; Erosion
• ISSN: 0304-3991; 1879-2723
• DOI: 10.1016/j.ultramic.2007.02.031

The ability to image complex general three-dimensional (3D) structures, including reentrant surfaces and undercut features using scanning probe microscopy, is becoming increasing important in many small length-scale applications. This paper presents a dexel data representation and its algorithm implementation for scanning probe microscope (SPM) image simulation (morphological dilation) and surface reconstruction (erosion) on such general 3D structures. Validation using simulations, some of which are modeled upon actual atomic force microscope data, demonstrates that the dexel representation can efficiently simulate SPM imaging and reconstruct the sample surface from measured images, including those with reentrant surfaces and undercut features.