Extraction of Frequency Dependent Macromodels for Mems Squeezed-Film Damping Effects

In this paper, an efficient macromodel extraction technique for dynamical MEMS gas damping effects is presented. The technique applies an Arnoldi-based model-order-reduction algorithm to generate low-order macromodels from a FEM approximation of the governing equation of the squeeze-film fluidic dam...

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Bibliographic Details
Published in:	Journal of mechanics Vol. 21; no. 4; pp. 227 - 234
Main Authors:	Joseph Yang, Yao-Joe, Chien, Chih-Ming, Kamon, Mattan, Rabinovich, Vladimir L., Gilbert, John R.
Format:	Journal Article
Language:	English
Published:	Cambridge, UK Cambridge University Press 01-12-2005
Subjects:	Macromodel MEMS Model order reduction Squeeze-film damping
Online Access:	Get full text
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Summary:	In this paper, an efficient macromodel extraction technique for dynamical MEMS gas damping effects is presented. The technique applies an Arnoldi-based model-order-reduction algorithm to generate low-order macromodels from a FEM approximation of the governing equation of the squeeze-film fluidic damping effect, the Reynolds equation. We demonstrate that this approach is more than 100 times efficient than previous approaches, which solve the Reynolds equation using transient finite-element/finite-difference methods. The generated gas-damping macromodels can be easily inserted into system-level modeling packages, such as SPICE, Saber and Simulink, for transient and frequency coupled-domain analysis. We also demonstrated that the simulated results are in good agreement with experimental results for various MEMS devices.
Bibliography:	ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23
ISSN:	1727-7191 1811-8216
DOI:	10.1017/S1727719100000666