Templated growth of diamond optical resonators via plasma-enhanced chemical vapor deposition

• Published in: Applied physics letters Vol. 109; no. 8
• Main Authors: Zhang, X., Hu, E. L.
• Format: Journal Article
• Language: English
• Published: Melville American Institute of Physics 22-08-2016
• Subjects: Applied physics; Chemical vapor deposition; Diamonds; Emitters; Lattice vacancies; Optical resonators; Organic chemistry; Photoluminescence; Plasma enhanced chemical vapor deposition; Refractivity; Silicon dioxide
• ISSN: 0003-6951; 1077-3118
• DOI: 10.1063/1.4961536

We utilize plasma-enhanced chemical vapor deposition through a patterned silica mask for templated diamond growth to create optical resonators. The pyramid-shaped structures have quality factors Q up to 600, measured using confocal photoluminescence spectroscopy, and mode volumes V as small as
2.5
(
λ
/
n
)
3
for resonances at wavelengths λ between 550 and 650 nm, and refractive index n, obtained using finite-difference time-domain simulations. Bright luminescence from nitrogen-vacancy and silicon-vacancy centers in the grown diamond is observed. The resonator design and fabrication technique obviates any etching of diamond, which preserves emitter properties in a pristine host lattice.