Yield Evaluation of 10-kA/cm ^ Nb Multi-Layer Fabrication Process Using Conventional Superconducting RAMs

To achieve larger scale and higher speed single flux quantum (SFQ) circuits, we have been developing a 10-kA/cm 2 Nb multi-layer fabrication process composed of more than six pla- narized Nb layers, an Nb/AlO x /Nb junction layer, a Mo resistor layer, and SiO 2 insulator layers. To evaluate reliabil...

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Bibliographic Details

Published in:	IEEE transactions on applied superconductivity Vol. 17; no. 2; pp. 177 - 180
Main Authors:	Nagasawa, S.., Satoh, T.., Hinode, K.., Kitagawa, Y.., Hidaka, M..
Format:	Journal Article
Language:	English
Published:	IEEE 01-06-2007
Subjects:	Circuits Fabrication Insulation Josephson junctions Niobium planarization technique Process design random access memories Random access memory Read-write memory reliability Resistors superconducting device fabrication Superconducting epitaxial layers
Online Access:	Get full text
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