Saturation currents in small-geometry bipolar transistors

Small-geometry transistor structures resulting from oxide-and groove-isolated processes are described. Methods for accurate determination of saturation currents are described, Experimental results from the two transistor structures are given and discussed. The results serve to demonstrate that data...

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Bibliographic Details
Published in:IEEE transactions on electron devices Vol. 31; no. 1; pp. 80 - 82
Main Author: Stevens, E.H.
Format: Journal Article
Language:English
Published: IEEE 01-01-1984
Online Access:Get full text
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Summary:Small-geometry transistor structures resulting from oxide-and groove-isolated processes are described. Methods for accurate determination of saturation currents are described, Experimental results from the two transistor structures are given and discussed. The results serve to demonstrate that data on saturation currents provide information useful in process control and in understanding the characteristics of small-geometry devices.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
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ISSN:0018-9383
1557-9646
DOI:10.1109/T-ED.1984.21477