Characterization of extreme ultraviolet emission from laser-produced spherical tin plasma generated with multiple laser beams
Spherical solid tin targets were illuminated uniformly with twelve beams from the Gekko XII laser system to create spherical plasmas, and the extreme ultraviolet (EUV) emission spectra from the plasmas were measured. The highest conversion efficiency of 3% to 13.5 nm EUV light in 2% bandwidth was at...
Saved in:
Published in: | Applied physics letters Vol. 86; no. 5; pp. 051501 - 051501-3 |
---|---|
Main Authors: | , , , , , , , , , , , , , , , , , , , |
Format: | Journal Article |
Language: | English |
Published: |
United States
American Institute of Physics
31-01-2005
|
Subjects: | |
Online Access: | Get full text |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Summary: | Spherical solid tin targets were illuminated uniformly with twelve beams from the Gekko XII laser system to create spherical plasmas, and the extreme ultraviolet (EUV) emission spectra from the plasmas were measured. The highest conversion efficiency of 3% to
13.5
nm
EUV light in 2% bandwidth was attained for an irradiance of around
5
×
10
10
W
∕
cm
2
. The experimental results were reproduced fairly well using a theoretical model taking the power balance in the plasma into consideration. |
---|---|
ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.1856697 |