Effect of the Electrical Conductivity of a Film on the Characteristics of an Radial Electric Field Excited Acoustic Resonator

• Published in: Acoustical physics Vol. 68; no. 6; pp. 564 - 568
• Main Authors: Teplykh, A. A., Zaitsev, B. D., Semyonov, A. P., Borodina, I. A.
• Format: Journal Article
• Language: English
• Published: Moscow Pleiades Publishing 01-12-2022; Springer; Springer Nature B.V
• Subjects: Acoustics; Dielectric films; Electric fields; Electric properties; Electrical conductivity; Electrical impedance; Electrical resistivity; Frequency ranges; Physical Acoustics; Physics; Physics and Astronomy; Piezoelectric ceramics; Resonators; Thin films; radial exciting electric field; electrical impedance; acoustic resonator; film conductivity; broadband acoustic spectroscopy
• ISSN: 1063-7710; 1562-6865
• DOI: 10.1134/S1063771022060136

The results of a study of the influence of the electrical conductivity of a thin film deposited on the free end of a radial electric field excited acoustic resonator field or located in its immediate vicinity on the resonator characteristics are presented. Three situations were considered: there is no conductive film, the film is deposited directly on the resonator free end, and the film is located at a short distance from the resonator free end. In all three cases, the electrical impedance of the resonator was calculated and measured in a wide frequency range of 1–1500 kHz. For the first time, the material constants of piezoceramics were refined for a free and short-circuited resonator and it was shown that these constants coincide with each other with good accuracy. It is shown that a decrease in the resonator thickness and an increase in the gap between the electrodes increase its sensitivity to the presence of a conductive film at a short distance from the resonator end.