The Topography of Surface and Light Transmission by Quartz Windows after Exposure in a High-Frequency Discharge in Deuterium and Mixture of Deuterium with Nitrogen

• Published in: Technical physics Vol. 66; no. 2; pp. 288 - 297
• Main Authors: Gorodetsky, A. E., Markin, A. V., Bukhovets, V. L., Zolotarevsky, V. I., Zalavutdinov, R. Kh, Babinov, N. A., Dmitriev, A. M., Razdobarin, A. G., Mukhin, E. E.
• Format: Journal Article
• Language: English
• Published: Moscow Pleiades Publishing 01-02-2021; Springer; Springer Nature B.V
• Subjects: Classical and Continuum Physics; Deuterium; Discharge; Light scattering; Light transmission; Physics; Physics and Astronomy; Physics of Nanostructures; Power spectral density; Quartz; Roughness; Spectral density function; Stoichiometry; Surface layers; Topography; Transparence
• ISSN: 1063-7842; 1090-6525
• DOI: 10.1134/S1063784221020122

The effect of a high-frequency discharge on the change in the topography of the surface of KU-1 optical quartz and transmission of visible light (400–1000 nm) is studied. The working gases of the discharge are D
2
and a D
2
/N
2
mixture, in which the fraction of N
2
is 25 mol %. The addition of nitrogen increases the rate of sputtering from 60 to 300 nm/h without changing the stoichiometry of the surface layers. After the exposure in plasma, the root-mean-square roughness of the surface decreases from 1.3 to 0.6 nm. The transparence of quartz remains unchanged. The analysis of the roughness and calculation of the diffuse light scattering with a wavelength of 400 nm after passing through quartz are executed using the power spectral density functions.