Improved Thermal Resistance and Electrical Conductivity of a Boron-Doped DLC Film Using RF-PECVD

Improved Thermal Resistance and Electrical Conductivity of a Boron-Doped DLC Film Using RF-PECVD

Diamond-like carbon (DLC) film doped with boron has unique properties and displays higher thermal resistance, lower internal stress, and better electrical conductivity than un-doped DLC film; this makes it is suitable for various applications, especially in outer space. Radio-frequency plasma-enhanc...

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Bibliographic Details
Published in:Frontiers in materials Vol. 7
Main Authors: Li, Wanrong, Tan, Xing Yan, Park, Yeong Min, Shin, Dong Chul, Kim, Dae Weon, Kim, Tae Gyu
Format: Journal Article
Language:English
Published: Frontiers Media S.A 07-07-2020
Subjects:
boron-doped
DLC
electrical resistance
RF-PECVD
thermal treatment
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Summary:Diamond-like carbon (DLC) film doped with boron has unique properties and displays higher thermal resistance, lower internal stress, and better electrical conductivity than un-doped DLC film; this makes it is suitable for various applications, especially in outer space. Radio-frequency plasma-enhanced chemical vacuum deposition of boron-doped DLC film was performed to determine the optimal percentage of boron for improving thermal resistance. Additional heat treatment and 40 vol% B2H6/CH4 yielded the best electrical conductivity. X-ray photoelectron spectroscopy, thermal gravimetric analysis, Raman spectroscopy, and the four-point probe method were utilized to analyze the properties of boron-doped DLC film. The boron-doped DLC film displayed outstanding performance in terms of thermal resistance and electrical conductivity.
ISSN:2296-8016
2296-8016
DOI:10.3389/fmats.2020.00201