Study of polymer humidity sensor array on silicon wafer

In this paper, we report the sensing properties of the humidity sensor array made of the polymer material quaternary acrylic resin (RMX) films on silicon substrate, including the sensitivity, hysteresis, response, and recovery times. Also analyzed are the properties of impedance and capacitance vers...

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Bibliographic Details
Published in:	Journal of materials science Vol. 39; no. 9; pp. 3155 - 3157
Main Authors:	Wang, Jing, Shi, Kaihe, Chen, Lihua, Zhang, Xiaojun
Format:	Journal Article
Language:	English
Published:	Heidelberg Springer 01-05-2004 Springer Nature B.V
Subjects:	Analytical chemistry Application fields Applied sciences Chemistry Exact sciences and technology General, instrumentation Materials science Polymer industry, paints, wood Sensor arrays Technology of polymers Polyelectrolyte Acrylate polymer Film Use Water content Silicon Chemical sensor Experimental study Wafer Quaternary ammonium polymer Deposition process
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Summary:	In this paper, we report the sensing properties of the humidity sensor array made of the polymer material quaternary acrylic resin (RMX) films on silicon substrate, including the sensitivity, hysteresis, response, and recovery times. Also analyzed are the properties of impedance and capacitance versus relative humidity (RH) at different frequencies.
Bibliography:	ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23
ISSN:	0022-2461 1573-4803
DOI:	10.1023/B:JMSC.0000025847.52357.b8