YBCO mid-infrared bolometer arrays

• Published in: IEEE transactions on applied superconductivity Vol. 13; no. 2; pp. 176 - 179
• Main Authors: Delerue, J., Gaugue, A., Teste, P., Caristan, E., Klisnick, G., Redon, M., Kreisler, A.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: New York, NY IEEE 01-06-2003; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Antennas; Applied sciences; Bolometer; infrared, submillimeter wave, microwave and radiowave receivers and detectors; Bolometers; Electronics; Exact sciences and technology; Frequency modulation; Infrared, submillimeter wave, microwave and radiowave instruments, equipment and techniques; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Microelectronic fabrication (materials and surfaces technology); Optical arrays; Optical crosstalk; Optical imaging; Optical modulation; Optical noise; Physics; Pixel; Radiocommunications; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Superconducting devices; Telecommunications; Telecommunications and information theory; Voltage; Yttrium barium copper oxide; Frequency dependence; Meander line; Crosstalk; Line widths; thermal crosstalk; Bolometers; Mid infrared radiation; YBaCuO; Response functions; mid-infrared; Imaging; High-Tc superconductors; Bolometer array
• ISSN: 1051-8223; 1558-2515
• DOI: 10.1109/TASC.2003.813674

A 2/spl times/2 array of YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// (YBaCuO) transition edge bolometers has been fabricated on an MgO substrate. The bolometers are of the meander type with line width and line spacing of 40 /spl mu/m. The meander length of a single bolometer is 12.5 mm, covering an area of 1 mm/spl times/1 mm. The voltage responsivity of each pixel, at 10 /spl mu/m wavelength, has been studied as a function of modulation frequency. The array exhibits a uniform response and an electrical noise equivalent power (NEP) of 4.2 /spl times/10/sup -12/ W//spl radic/Hz or an optical NEP of 1 /spl times/10/sup -9/ W//spl radic/Hz. Thermal crosstalk between adjacent pixels has been also studied and first imaging results are presented.