Laser induced damage/ablation morphology on the 8(Al/Ti)/Si system in different ambient conditions

• Published in: Optics and laser technology Vol. 54; pp. 22 - 29
• Main Authors: Petrović, S.M., Peruško, D., Salatić, B., Bogdanović-Radović, I., Panjan, P., Gaković, B., Pantelić, D., Trtica, M., Jelenković, B.
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 30-12-2013
• Subjects: Ablation; Al/Ti nanolayered thin film; Craters; Ethyl alcohol; Formations; Inter-mixing; Laser ablation; Lasers; Silicon; Thin films; Titanium; Al/Ti nanolayered thin film; Inter-mixing; Laser ablation
• ISSN: 0030-3992; 1879-2545
• DOI: 10.1016/j.optlastec.2013.04.030

A study of morphological and composition changes of the (8(Al/Ti)/Si) system induced by laser pulses in different ambient conditions is presented. The effects of an Er, Yb, Cr—Glass laser, operating at 1540nm wavelength with pulse duration of 44ns, on a complex target were investigated. Irradiation of 8(Al/Ti)/Si was carried out at intensities of 5.9 and 9.5×1011Wm−2 in air, water and ethanol. The laser-induced morphological and composition modifications have shown dependence on applied intensities, number of laser pulses and ambient conditions. The following morphological changes were observed: (i) intense surface melting of the thin film and Si-substrate; (ii) ablation/exfoliation of the 8(Al/Ti) multilayer thin film from Si, (iii) appearance of hydrodynamic features such as resolidified material, and (iv) formation of crater at multi-pulse action. The formation of parallel periodic surface structure was only occurring in single pulse air-assisted modification. Analysis of the composition revealed that laser modification induced intermixing between the components of individual Al and Ti layers with potential formation of AlTi intermetallic compounds.
•The 8(Al/Ti)/Si system was modified by nanosecond Er, Yb, Cr—Glass laser.•Surface morphology and composition were examined after laser action in air and liquid.•Surface periodic structure occurred in single pulse air-assisted modification.•Single pulse irradiation induced interdiffusion between Al and Ti nano-layers.•Multipulse action induced damage/ablation of thin film and substrate.