Chemisorption-induced microcantilever deflection: a theoretical model

• Published in: Philosophical magazine letters Vol. 93; no. 4; pp. 183 - 195
• Main Authors: Zhang, J. Q., Feng, X. Q., Huang, G. Y., Yu, S. W.
• Format: Journal Article
• Language: English
• Published: Abingdon Routledge 01-04-2013; Taylor & Francis; Taylor & Francis Ltd
• Subjects: Adsorption; Atoms & subatomic particles; Bending; Bending stresses; Chemical bonds; Chemisorption; Deflection; Deformation; Energy methods; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Keating-type potential; Mechanical instruments, equipment and techniques; microcantilever; Micromechanical devices and systems; Optimization; Physics; relaxation; Stress relaxation; Stresses; Surface chemistry; surface stress; Chemisorption; Deformation; Valence; Bending; Measuring methods; Microelectromechanical device; Cantilever beam; Surface stresses
• ISSN: 0950-0839; 1362-3036
• DOI: 10.1080/09500839.2012.759292

Microcantilever-based techniques are often used to measure the changes of surface stress and infinitesimal mass induced by adsorbed atoms/molecules on the cantilever surface. In this paper, an energy method using a valence force model is presented to study the cantilever bending behaviour induced by chemisorption. The surface stress change induced by chemisorption is estimated. The chemisorption of oxygen on Si(100) surface is taken as a representative example. The results are consistent with relevant experimental observations. It is shown that chemisorption-induced deformation behaviour of cantilevers shows a distinct dependence on the bond configurations formed by adsorbed atoms and substrate atoms, as illustrated by the Si(100)-O cluster in this paper. The study is helpful for the optimal design of microcantilever-based measurement techniques.