Superconducting MoC thin films with enhanced sheet resistance

• Published in: Applied surface science Vol. 312; pp. 216 - 219
• Main Authors: TRGALA, M, ZEMLICKA, M, GRAJCAR, M, NEILINGER, P, REHAK, M, LEPORIS, M, GAZI, S, GREGUS, J, PLECENIK, T, ROCH, T, DOBROCKA, E
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier 01-09-2014
• Subjects: Argon; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Coplanar waveguides; Cross-disciplinary physics: materials science; rheology; Deposition; Electrical resistivity; Exact sciences and technology; Nanostructure; Physics; Resonators; Superconductivity; Thin films; MoC; Superconducting thin films; Resonator; Sheet resistivity; Sheet resistance; Critical temperature; Resonators
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2014.05.200

In this paper we describe a process of MoC superconducting thin films preparation by reactive magnetron sputtering in argon-acetylene atmosphere. The deposition process was optimized to achieve very smooth superconducting thin films with high sheet resistance. We present the results of four-point resistance measurements in cryostat cooled down to 300mK. The roughness was measured by the atomic force microscope (AFM). The results are so far promising and enable us to pattern superconducting coplanar waveguide resonator with embedded nanostructures.