Synthesis of Superhard and Elastic Carbon Nitride Films by Filtered Cathodic Vacuum arc Combined with Radio Frequency Ion Beam Source

• Published in: Journal of materials research Vol. 17; no. 3; pp. 521 - 524
• Main Authors: Cheng, Y. H., Tay, B. K., Lau, S. P., Shi, X., Qiao, X. L., Chen, J. G., Wu, Y. P., Sun, Z. H., Xie, C. S.
• Format: Journal Article
• Language: English
• Published: New York, USA Cambridge University Press 01-03-2002
• Subjects: Rapid Communications
• ISSN: 0884-2914; 2044-5326
• DOI: 10.1557/JMR.2002.0072

Superhard and elastic carbon nitride films with hardness and elastic recovery of 47 GPa and 87.5%, respectively, were synthesized by using a double-bend filtered cathodic vacuum arc combined with radio-frequency nitrogen ion beam source. The bombardment of energetic nitrogen atom onto the growing film surface results in the high atomic ratio of N/C (0.4), which contributes to the high sp2 content and the formation of a five-membered ring structure in the carbon nitride film at room temperature. The buckling of the five-membered ring basal planes may facilitate cross-linking between the planes through sp3 coordinated carbon atoms. A rigid three-dimensional network is formed, which contributes to the high hardness and elastic recovery of the deposited films.