Sustainability of active bulk plasma with high electronegativity in capacitive high frequency plasma

• Published in: Japanese Journal of Applied Physics Vol. 61; no. 2; pp. 26002 - 26007
• Main Author: Makabe, Toshiaki
• Format: Journal Article
• Language: English
• Published: Tokyo IOP Publishing 01-02-2022; Japanese Journal of Applied Physics
• Subjects: Charged particles; Correlation between (E(t)/Ng)eff and DC-(E/Ng)Crit; Critical DC-reduced field (E/Ng)Crit; Effective reduced-field (E(t)/Ng)eff in bulk plasma; Electric fields; Electronegativity; HF-CCP in electronegative gas; ion-ion plasma; Ions; Plasma; Relation between electronegativity and ionization degree; Sustainability
• ISSN: 0021-4922; 1347-4065
• DOI: 10.35848/1347-4065/ac468d

In a high-frequency capacitively coupled plasma (HF-CCP), few studies have been carried out for the transport of charged particles in the active bulk plasma with high electronegativity. The electric field
E
(
t
), specifically, time-varying reduced field
E
(
t
)/
N
g
provides key knowledge about the characteristics of collisional bulk plasma. Numerical modeling is the only method for estimating
E
(
t
)/
N
g
, while a limited number of collision cross sections and related transport parameters are available. Under these circumstances, we discuss how to estimate the reduced field
E
(
t
)/
N
g
, i.e.
E
(
t
) in active bulk plasma with high electronegativity in HF-CCP through investigation of the correlation between the DC-critical reduced field
E
/
N
g
Crit
.
and the HF-effective reduced field
E
(
t
)
/
N
g
eff
. Our previous discussion on the correlation is validated by increasing the number of results of
E
(
t
)
/
N
g
eff
. The relation between the electronegativity and the ionization degree is derived from the sustainable condition in the bulk plasma.