Precise angle and position detection utilizing optical interference on metal-oxide-semiconductor-type position-sensitive detectors

• Published in: Japanese Journal of Applied Physics Vol. 34; no. 2A; pp. 638 - 642
• Main Authors: NIU, H, SHIRAISHI, T, YOSHIDA, H, MATSUDA, T, KISHINO, S
• Format: Journal Article
• Language: English
• Published: Tokyo Japanese journal of applied physics 1995
• Subjects: Exact sciences and technology; Fundamental areas of phenomenology (including applications); Imaging detectors and sensors; Measurements common to several branches of physics and astronomy; Metrology, measurements and laboratory procedures; Optical elements, devices, and systems; Optics; Physics; Spatial dimensions (e.g.: position, lengths, volume, angles, displacements, including nanometer-scale displacements); Spatial dimensions (eg, position, lengths, volume, angles, displacements, including nanometer-scale displacements); Positioning; Position sensitive detectors; Radiation detectors; Light interference; Measuring instruments; Displacements; Photodetectors; Experimental study; Inclination; MOS junctions
• DOI: 10.1143/JJAP.34.638
• EISSN: 1347-4065
• ISSN: 0021-4922

The optical interference effect is applied to the previously presented metal-oxide-semiconductor (MOS)-type position-sensitive detector (PSD) to achieve more precise measurements. New interference methods are proposed for the precise measurement of angles and positions, which have been examined by the use of Al-SiO
2
-Si PSD.
It has been experimentally verified that the PSD is convenient for optical interference to produce periodic output signals indicating half-wavelength displacement. A resolution of one second has been demonstrated for the simple angle-detection system in which only an optical-parallel glass plate is added to the PSD measurement system, and that of 20 nm for the position-detection system of a Michelson-type interferometer incorporated with the PSD.