Nanocones on (a-C:H):Si composite films: Thermal stability, growth dynamics and electrical properties

• Published in: Diamond and related materials Vol. 16; no. 4; pp. 1218 - 1221
• Main Authors: Frolov, V.D., Zavedeev, E.V., Pimenov, S.M., Konov, V.I., Loubnin, E.N., Kirpilenko, G.G.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01-04-2007
• Subjects: Amorphous carbon films; Nanolithography; Scanning probe microscopy; Scanning probe microscopy; Nanolithography; Amorphous carbon films
• ISSN: 0925-9635; 1879-0062
• DOI: 10.1016/j.diamond.2006.11.013

Some aspects of Scanning Probe Microscopy (SPM) — based nanostructuring of (a-C:H):Si composite films, including (i) correlations between geometrical and electrical properties of modified regions during SPM actions, (ii) deviations of the nanocone shape under heat treatment, and (iii) the influence of ambient humidity on the nanocone growth, were studied. The investigations revealed an initial period of SPM actions, during which no modification of the film surface was registered. On finishing this period, the film conductivity was found to rapidly decrease, and just at this moment the nanocone growth started. The formed nanocone kept its shape after heat treatments up to 700 °C under vacuum conditions of ∼
100 Pa. It was also found that the higher the humidity, the faster was the nanocone growth. The latter was accompanied by the formation of a corrugated pedestal. The nature of the observed phenomenon is discussed.