Post-annealing effect of thin platinum oxide film on tin oxide film for an application enhancing gas sensitivity

Post-annealing effect of thin platinum oxide film on tin oxide film for an application enhancing gas sensitivity

A thin platinum oxide film was stacked on a tin oxide film, a well-known gas-sensing semiconductor, to improve its gas sensitivity. The response property to ethanol gas was enhanced by about three times by the stacking annealed at 600 °C. Post-annealing, platinum oxide was reduced to platinum and ti...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics Vol. 61; no. 8; pp. 88004 - 88007
Main Authors: Shima, Takayuki, Furukawa, Hiromitsu
Format: Journal Article
Language:English
Published: Tokyo IOP Publishing 01-08-2022
Japanese Journal of Applied Physics
Subjects:
Annealing
Ethanol
Gas sensors
gas-sensing
High temperature
Oxide coatings
platinum oxide
Platinum oxides
Sensitivity enhancement
thermal reduction
tin oxide
Tin oxides
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Summary:A thin platinum oxide film was stacked on a tin oxide film, a well-known gas-sensing semiconductor, to improve its gas sensitivity. The response property to ethanol gas was enhanced by about three times by the stacking annealed at 600 °C. Post-annealing, platinum oxide was reduced to platinum and tin oxide was in a polycrystalline state. The results indicate that applying platinum oxide is effective in improving sensitivity when annealing at a high temperature of 600 °C is required for the fabrication of gas sensors.
Bibliography:JJAP-104463.R1
ISSN:0021-4922
1347-4065
DOI:10.35848/1347-4065/ac8299