On the annealing temperature, penetration depth of oxygen and film thickness on the DC and AC electrical properties and nano-structure of Ti thin films

• Published in: Vacuum Vol. 84; no. 6; pp. 770 - 777
• Main Authors: Khojier, K., Savaloni, H.
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 04-02-2010
• Subjects: Ac and Dc resistivity; AFM; Annealing; Atomic force microscopy; Film thickness; Grain size; Grains; Hall effect; Impedance spectroscopy; Nanostructure; RBS; Thin films; Titanium; Titanium oxide; XRD; Thin films; RBS; AFM; Hall effect; XRD; Ac and Dc resistivity; Impedance spectroscopy; Titanium oxide
• ISSN: 0042-207X; 1879-2715
• DOI: 10.1016/j.vacuum.2009.10.014

Ti films of different thickness ranging from 12.3 to 246.2
nm were deposited, using resistive heat method and post-annealed at different temperatures with a flow of 5
cm
3
s
−1 oxygen. The nano-structures of the films were obtained using X-ray diffraction (XRD) and atomic force microscopy (AFM). The results showed an initial reduction of the grain size at 373
K annealing temperature and increase of the grain size at higher temperatures. The cause of this was due to the reaction of oxygen with Ti atoms which breaks up the Ti grains and hence needle–like features form. The enhancement of activation processes at higher temperatures results in larger grains. The analysis of XRD in conjunction with AFM images showed that those films containing (004) line of anatase phase and sub-oxide phases of titanium oxide also show two types of grains in the AFM images. The resistivity of the film increased with annealing temperature, which is due to competition between increased diffusion rate and the increased reaction rate of oxygen with Ti atoms. The Hall coefficient
R
H and the mobility
μ decreased with increasing film thickness at all annealing temperatures, while
R
H increases and
μ decreases with increasing the annealing temperature. The carrier concentration increased with film thickness and decreased with annealing temperature. The impedance spectroscopy showed that all films have a pure RC behaviour, where the magnitude of
R depends on the annealing temperature and film thickness. The apparent activation energies
E
a, obtained from three different methods, namely
σ,
R
H and grain size showed good agreement within 0.30–0.46
eV for the range of film thickness examined in this work. It was found that films with thickness less than 70
nm can be recognized as Ti-oxide films while thicker films are only surface-oxidised Ti films.