Study of kinetics of atomic carbon during laser ablation of graphite in nitrogen by time- and space-resolved emission spectroscopy

We performed plasma optical emission studies during XeCl laser ablation of graphite in nitrogen at a laser fluence of 12 J/cm 2, this corresponding to the experimental conditions for which the growth of microcrystalline CN x film by pulsed laser deposition has been observed. In this work, we focus o...

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Bibliographic Details
Published in:Applied surface science Vol. 186; no. 1; pp. 329 - 334
Main Authors: Acquaviva, S, De Giorgi, M.L
Format: Journal Article Conference Proceeding
Language:English
Published: Amsterdam Elsevier B.V 28-01-2002
Elsevier Science
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Summary:We performed plasma optical emission studies during XeCl laser ablation of graphite in nitrogen at a laser fluence of 12 J/cm 2, this corresponding to the experimental conditions for which the growth of microcrystalline CN x film by pulsed laser deposition has been observed. In this work, we focus our attention on the temporal and spatial evolution of the C I emission line at 247.86 nm in vacuum and for different nitrogen pressures, in the range from 1 to 50 Pa. The plasma expansion in nitrogen background has been analysed in terms of drag model. Results show that in our experimental conditions gas-phase reactions are dominant. Kinetic energies for atomic carbon of the order of tens of electronvolts have been inferred from the emission spectra.
ISSN:0169-4332
1873-5584
DOI:10.1016/S0169-4332(01)00667-5