Study of kinetics of atomic carbon during laser ablation of graphite in nitrogen by time- and space-resolved emission spectroscopy
We performed plasma optical emission studies during XeCl laser ablation of graphite in nitrogen at a laser fluence of 12 J/cm 2, this corresponding to the experimental conditions for which the growth of microcrystalline CN x film by pulsed laser deposition has been observed. In this work, we focus o...
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Published in: | Applied surface science Vol. 186; no. 1; pp. 329 - 334 |
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Main Authors: | , |
Format: | Journal Article Conference Proceeding |
Language: | English |
Published: |
Amsterdam
Elsevier B.V
28-01-2002
Elsevier Science |
Subjects: | |
Online Access: | Get full text |
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Summary: | We performed plasma optical emission studies during XeCl laser ablation of graphite in nitrogen at a laser fluence of 12
J/cm
2, this corresponding to the experimental conditions for which the growth of microcrystalline CN
x
film by pulsed laser deposition has been observed. In this work, we focus our attention on the temporal and spatial evolution of the C I emission line at 247.86
nm in vacuum and for different nitrogen pressures, in the range from 1 to 50
Pa. The plasma expansion in nitrogen background has been analysed in terms of drag model. Results show that in our experimental conditions gas-phase reactions are dominant. Kinetic energies for atomic carbon of the order of tens of electronvolts have been inferred from the emission spectra. |
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ISSN: | 0169-4332 1873-5584 |
DOI: | 10.1016/S0169-4332(01)00667-5 |