Ohmic contacts on diamond by B ion implantation and Ta–Au metallization

• Published in: Diamond and related materials Vol. 11; no. 9; pp. 1709 - 1712
• Main Authors: Zhen, C.M, Wang, Y.Y, Guo, Q.F, Zhao, M, He, Z.W, Guo, Y.P
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 01-09-2002; Elsevier
• Subjects: Applied sciences; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Diamond films; Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures; Electronic transport in interface structures; Electronics; Exact sciences and technology; Interface/Interfacial; Metal-nonmetal contacts; Metallization, contacts, interconnects; device isolation; Metals. Metallurgy; Microelectronic fabrication (materials and surfaces technology); Ohmic contact; Physics; Pretreated substrates; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Pretreated substrates; Ohmic contact; Diamond films; Interface/Interfacial; Voltage current curve; Synthetic mineral; Solid solid interface; Metallizing; Crystal doping; Inorganic compound; Thin film; Thick film; Boron addition; Pretreatment; Interface reaction; Thermal annealing; Non metal; Gold; Ion implantation; Transition metal; Diamond; Carburetion; Experimental study; Contamination; Substrate; Tantalum; Transition metal compounds; Bilayers
• ISSN: 0925-9635; 1879-0062
• DOI: 10.1016/S0925-9635(02)00144-9

Ohmic contacts on diamond have been achieved by B ion implantation and subsequent metallization with a Ta/Au bilayer. The pre-treatment of p-diamond film using boiling aqua regia was effective in reducing oxygen, which plays an important role in forming the Au/Ta/p-diamond ohmic contacts. Sputter deposition and implantation accelerate the interfacial reaction between Ta and diamond film. The formation of TaC makes our contacts to be ohmic in the as-deposited state. Upon annealing, the quantity of TaC increases and it makes the ohmic behavior be improved.