Highly sensitive infrared temperature sensor using self-heating compensated microbolometers

• Published in: Sensors and actuators. A. Physical. Vol. 79; no. 2; pp. 122 - 127
• Main Authors: Ramakrishna, M.V.S, Karunasiri, G, Neuzil, P, Sridhar, U, Zeng, W.J
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier B.V 01-02-2000; Elsevier Science
• Subjects: Bolometer; Bolometer; infrared, submillimeter wave, microwave and radiowave receivers and detectors; Bolometers; infrared, submillimeter wave, microwave, and radiowave receivers and detectors; Compensation; Exact sciences and technology; Infrared; Infrared, submillimeter wave, microwave and radiowave instruments, equipment and techniques; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Physics; Self-heating; Thermal conductance; Thermal instruments, apparatus and techniques; Thermometer; Thermometry; Titanium; Thermometer; Infrared; Compensation; Self-heating; Bolometer; Titanium; Thermal conductance; Thermometers; Infrared detection; Self heating; Bolometers; Experimental study
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/S0924-4247(99)00280-0

This paper experimentally demonstrates a novel technique that drastically reduces the self-heating effect in microbolometers and which can be used to enhance the response due to infrared (IR). This is accomplished by using two bolometers with tailored thermal parameters, in particular, similar thermal mass but different thermal conductivity. Test devices with responsivity of over 6000 V/W at bias voltage of 3 V have been fabricated. Results indicate that this method is robust even under considerable mismatch of device parameters. We believe that this technique would pave way for realization of relatively simple, low cost and sensitive IR detectors for use in thermometry, imaging and other IR applications.