A micromachined magnetic-field sensor based on an electron tunneling displacement transducer

• Published in: Sensors and actuators. A. Physical. Vol. 86; no. 1; pp. 8 - 20
• Main Authors: DiLella, D., Whitman, L.J., Colton, R.J., Kenny, T.W., Kaiser, W.J., Vote, E.C., Podosek, J.A., Miller, L.M.
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier B.V 30-10-2000; Elsevier Science
• Subjects: Applied sciences; Electronics; Exact sciences and technology; General equipment and techniques; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Lithography, masks and pattern transfer; Magnetic components, instruments and techniques; Magnetic-field sensor; MEMS; Microelectronic fabrication (materials and surfaces technology); Physics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Transducers; Tunnel sensor; Magnetic-field sensor; Tunnel sensor; MEMS; Transducers; Displacement control; Magnetic sensors; Noise source; Micromachining; Electron tunneling spectroscopy; Magnetic fields; Experimental study; STM
• ISSN: 0924-4247; 1873-3069
• DOI: 10.1016/S0924-4247(00)00303-4

We describe a micromachined magnetic-field sensor that is based on an electron tunneling transducer. This tunnel sensor is small, very sensitive, operates at ambient temperature and requires very little power. The measured resolution of the sensor is 0.3 nT/√Hz at 1 Hz. The limiting resolution, calculated based on fundamental noise sources, is 0.002 nT/√Hz at 1 Hz. The dominant source of the observed noise in the present device is low frequency air pressure fluctuations.