Enhanced Radio Frequency Field Penetration in an Inductively Coupled Plasma
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| Published in: | Physical review letters Vol. 77; no. 7; pp. 1286 - 1289 |
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| Main Author: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
United States
12-08-1996
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| Online Access: | Get full text |
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| Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
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| ISSN: | 0031-9007 1079-7114 |
| DOI: | 10.1103/PhysRevLett.77.1286 |