Theoretical Study on Relationship between Acid Generation Efficiency and Acid Generator Concentration in Chemically Amplified Extreme Ultraviolet Resists

Theoretical Study on Relationship between Acid Generation Efficiency and Acid Generator Concentration in Chemically Amplified Extreme Ultraviolet Resists

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Bibliographic Details
Published in:Japanese Journal of Applied Physics Vol. 46; no. 12L; p. L1143
Main Authors: Kozawa, Takahiro, Tagawa, Seiichi, Shell, Melissa
Format: Journal Article
Language:English
Published: 01-12-2007
Online Access:Get full text
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Description
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.46.L1143