Photoelectron spectroscopy and secondary ion mass spectrometry characterization of diamond-like carbon films

• Published in: Thin solid films Vol. 515; no. 13; pp. 5386 - 5390
• Main Authors: MATOLIN, V, MATOLINOVA, I, VELTRUSKA, K, MASEK, K
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier B.V 07-05-2007; Elsevier Science
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Diamond-like carbon; Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures; Exact sciences and technology; Fullerenes and related materials; diamonds, graphite; Materials science; Other semiconductors; Photoelectron spectroscopy; Physical radiation effects, radiation damage; Physics; SIMS; Specific materials; Structure of solids and liquids; crystallography; Surface and interface electron states; Surface states, band structure, electron density of states; TDS; TDS; Diamond-like carbon; SIMS; Photoelectron spectroscopy; Radiation effects; Valence bands; Annealing; Localized states; Cross section; Amorphization; Secondary ion mass spectrometry; Desorption; III-V compound; Thin films; Gallium phosphides; Synchrotron radiation; Photoexcitation; III-V semiconductors
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2006.12.028

Photoelectron spectroscopy at different photon energies was used to optimize the photoexcitation cross section for valence band study of diamond-like hydrogenated carbon films. The electronic states of diamond-like carbon (DLC) were studied by synchrotron radiation photoelectron spectroscopy and ultraviolet photoelectron spectroscopy. The valence band spectra measured at different excitation energies show the gradual emergence of the p–
π band in relation to the sample annealing and ion bombardment amorphization. The p–
π band of the annealed DLC was characterized by localized
p
z states whilst the formation of the amorphous carbon surface was accompanied by appearance of the delocalized
p
z states in the gap. Secondary ion mass spectrometry and thermal desorption spectroscopy showed that sample annealing was accompanied by hydrogen content decrease.