Implantation of keV-energy argon clusters and radiation damage in diamond
We show that for impacting argon clusters, both mean projected ranges of the constituents and depths of radiation damage in diamond scale linearly with momentum. The same dependence was earlier found for keV-energy cluster implantation in graphite, thus suggesting the universality of this scaling la...
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Published in: | Physical review. B, Condensed matter and materials physics Vol. 85; no. 3 |
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Main Authors: | , , , |
Format: | Journal Article |
Language: | English |
Published: |
17-01-2012
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Subjects: | |
Online Access: | Get full text |
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Summary: | We show that for impacting argon clusters, both mean projected ranges of the constituents and depths of radiation damage in diamond scale linearly with momentum. The same dependence was earlier found for keV-energy cluster implantation in graphite, thus suggesting the universality of this scaling law. For diamond, a good agreement for the value of displacement energy for the case of cluster impact is found by comparing the calculated target sputtering and experimentally measured depth of radiation damage. |
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Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ISSN: | 1098-0121 1550-235X |
DOI: | 10.1103/PhysRevB.85.033405 |