Implantation of keV-energy argon clusters and radiation damage in diamond

We show that for impacting argon clusters, both mean projected ranges of the constituents and depths of radiation damage in diamond scale linearly with momentum. The same dependence was earlier found for keV-energy cluster implantation in graphite, thus suggesting the universality of this scaling la...

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Bibliographic Details
Published in:Physical review. B, Condensed matter and materials physics Vol. 85; no. 3
Main Authors: Popok, V. N., Samela, J., Nordlund, K., Popov, V. P.
Format: Journal Article
Language:English
Published: 17-01-2012
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Summary:We show that for impacting argon clusters, both mean projected ranges of the constituents and depths of radiation damage in diamond scale linearly with momentum. The same dependence was earlier found for keV-energy cluster implantation in graphite, thus suggesting the universality of this scaling law. For diamond, a good agreement for the value of displacement energy for the case of cluster impact is found by comparing the calculated target sputtering and experimentally measured depth of radiation damage.
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content type line 23
ISSN:1098-0121
1550-235X
DOI:10.1103/PhysRevB.85.033405