Poly(Dimethylsiloxane) Waveguide Cantilevers for Optomechanical Sensing

• Published in: IEEE photonics technology letters Vol. 21; no. 2; pp. 79 - 81
• Main Authors: Llobera, A., Cadarso, V.J., Zinoviev, K., Dominguez, C., Buttgenbach, S., Vila, J., Plaza, J.A., Biittgenbach, S.
• Format: Journal Article
• Language: English
• Published: New York IEEE 01-01-2009; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Droplets; Ethyl alcohol; Evaporation; Integrated optics; Light emitting diodes; Lithography; Microoptoelectromechanical systems (MOEMS); microsensors; Monolithic integrated circuits; Noise levels; Numerical simulation; Optical materials; optical polymers; Optical properties; Optical sensors; Optical waveguides; plastics; Resonant frequencies; Resonant frequency; Silicon; Silicone resins; Soft lithography; waveguides
• ISSN: 1041-1135; 1941-0174
• DOI: 10.1109/LPT.2008.2008659

The optical and structural properties of poly(dimethylsiloxane) (PDMS) are considered to define disposable cantilever-based micooptoelectromechanical systems (MOEMS) by ways of soft lithography and with a high degree of monolithic integration. The very low Young's modulus of this material relaxes the dimensions' requirements, being then possible to define thick PDMS structures with a sensitivity comparable to nanometer scale silicon counterparts. Experimental results using a light-emitting diode working at 670 nm have determined the resonant frequencies of the proposed MOEMS and are in agreement with the numerical simulations done. Finally, when a 2-mu L droplet of ethanol (1.58 mg) is dispensed on the cantilever, relative losses rise to 25 dB, returning to its initial value when the droplet evaporates.