Self-ordered Porous Anodic Alumina Templates by a Combinatory Anodization Technique in Oxalic and Selenic Acids
A combinatory two-step anodization technique is presented to prepare self-ordered porous anodic alumina (PAO) templates. The first and second anodization steps are performed in oxalic and selenic acid at 40 V and 45 V, respectively, giving rise to 13-nm-diameter PAOs with high ordering and porosity...
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Published in: | Journal of electronic materials Vol. 50; no. 8; pp. 4787 - 4796 |
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Main Authors: | , , , |
Format: | Journal Article |
Language: | English |
Published: |
New York
Springer US
01-08-2021
Springer Nature B.V |
Subjects: | |
Online Access: | Get full text |
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Summary: | A combinatory two-step anodization technique is presented to prepare self-ordered porous anodic alumina (PAO) templates. The first and second anodization steps are performed in oxalic and selenic acid at 40 V and 45 V, respectively, giving rise to 13-nm-diameter PAOs with high ordering and porosity of 1.4%. The anodization time for the second step is also changed to investigate the effect of the oxide layer thickness on the pore ordering, using field-emission scanning electron microscopy and fast Fourier transform analyses. Increasing the anodization time from 20 min to 1 h considerably improved the ordering and hexagonal domain structures. Further increasing the anodization time up to 8 h continuously deteriorated the ordering of the PAOs, although the nanopore growth rate remained almost constant. The fabrication of small-diameter PAOs in selenic acid is discussed and related to the electric field concentration at the oxide–electrolyte interface at the bottom of pores. |
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ISSN: | 0361-5235 1543-186X |
DOI: | 10.1007/s11664-021-08973-x |