Evaluation of diamond mosaic wafer crystallinity by electron backscatter diffraction

• Published in: Diamond and related materials Vol. 101; p. 107558
• Main Authors: Matsushita, Akio, Fujimori, Naoji, Tsuchida, Yuki, Ohtani, Noboru, Dojima, Daichi, Koide, Kazunori, Kaneko, Tadaaki, Shikata, Shinichi
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 01-01-2020; Elsevier BV
• Subjects: Crystal structure; Diamond; Diamonds; Dislocation; Dislocation vector; Electron backscatter diffraction; Power device; Rotation; Single crystals; Substrates; X-ray topography; Dislocation vector; Power device; Diamond; X-ray topography; Dislocation
• ISSN: 0925-9635; 1879-0062
• DOI: 10.1016/j.diamond.2019.107558

A mosaic substrate is a promising candidate to create large size single crystal diamonds for various types of applications. In this study, the crystal orientations of the joint areas of four single crystal plates of a mosaic substrate were measured using the high resolution electron backscatter diffraction method. The lattice rotation of [110] to [–110] (X-Y direction) was less than 0.5° and the lattice rotation mappings of [001] to [110] (Z-X direction) and [1–10] (Z-Y direction) were less than 0.2°. Considering that plate alignment is not particularly considered during the fabrication process, further improvement can be expected to realize a well- aligned mosaic substrate.
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•The lattice rotations of the joint areas of four single crystal plates of a mosaic substrate were less than 0.5°.