Fabrication and optimization of bimorph micro probes for the measurement of individual biocells

• Published in: Microsystem technologies Vol. 12; no. 1-2; pp. 30 - 37
• Main Authors: CHO, Y. H, COLLARD, D, BUCHAILLOT, L, CONSEIL, F, KIM, B. J
• Format: Conference Proceeding Journal Article
• Language: English
• Published: Berlin Springer 01-12-2005; Springer Verlag
• Subjects: Applied fluid mechanics; Applied sciences; Biological and medical sciences; Biosensors; Biotechnology; Exact sciences and technology; Fluid dynamics; Fluidics; Fundamental and applied biological sciences. Psychology; Fundamental areas of phenomenology (including applications); Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Methods. Procedures. Technologies; Micromechanical devices and systems; Physics; Precision engineering, watch making; Various methods and equipments; Biotechnology; Bimorph transducer; Microsensor; Epoxy resin; Microactuators; SU-8; Modeling; Optimization; Cantilever beam; Single-cell detection; Parallel system; Thermal activation; Biosensor; Microparticle; Embedded transducer; Monitoring control system; Microelectromechanical device; Microfluidics; Actuator; Fluidics; Photoresist; Bimorph micro thermal actuator
• ISSN: 0946-7076; 1432-1858
• DOI: 10.1007/s00542-005-0010-1