Optical study of porous silicon buried waveguides fabricated from p-type silicon
The realisation of optical buried waveguides fabricated from porous silicon layers is presented. The refractive index of porous silicon layer varies according to its porosity and its oxidisation process conditions. So either step or graded index waveguides are achieved. These waveguides are formed b...
Saved in:
| Published in: | Materials science in semiconductor processing Vol. 3; no. 5; pp. 357 - 361 |
|---|---|
| Main Authors: | , , , |
| Format: | Journal Article |
| Language: | English |
| Published: |
Elsevier Ltd
01-10-2000
|
| Subjects: | |
| Online Access: | Get full text |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Abstract | The realisation of optical buried waveguides fabricated from porous silicon layers is presented. The refractive index of porous silicon layer varies according to its porosity and its oxidisation process conditions. So either step or graded index waveguides are achieved. These waveguides are formed by a localised anodisation of heavily doped p-type silicon wafers. Measurements at a wavelength of 1.3
μm yield waveguide losses below 4
dB/cm. The waveguides are also characterised by the near-field-guided mode profile at 1.3
μm. This study deals with the modulation of the waveguiding-layer refractive index and the losses on waveguides fabricated from p
+. |
|---|---|
| AbstractList | The realisation of optical buried waveguides fabricated from porous silicon layers is presented. The refractive index of porous silicon layer varies according to its porosity and its oxidisation process conditions. So either step or graded index waveguides are achieved. These waveguides are formed by a localised anodisation of heavily doped p-type silicon wafers. Measurements at a wavelength of 1.3
μm yield waveguide losses below 4
dB/cm. The waveguides are also characterised by the near-field-guided mode profile at 1.3
μm. This study deals with the modulation of the waveguiding-layer refractive index and the losses on waveguides fabricated from p
+. |
| Author | Boisrobert, C Haji, L Lupi, C Charrier, J |
| Author_xml | – sequence: 1 givenname: J surname: Charrier fullname: Charrier, J organization: Groupe de Microélectronique et Visualisation, Université de Rennes 1, I.U.T. de Lannion, Boı̂te Postale 150, 22302 Lannion, Cedex, France – sequence: 2 givenname: C surname: Lupi fullname: Lupi, C organization: Laboratoire de Physique des Isolants et d’Optronique, Faculté des Sciences, 2 Rue de la Houssinière, Boı̂te Postale 92208, 44322 Nantes Cedex 03, France – sequence: 3 givenname: L surname: Haji fullname: Haji, L email: lazhar.haji@iut-lannion.fr organization: Groupe de Microélectronique et Visualisation, Université de Rennes 1, I.U.T. de Lannion, Boı̂te Postale 150, 22302 Lannion, Cedex, France – sequence: 4 givenname: C surname: Boisrobert fullname: Boisrobert, C organization: Laboratoire de Physique des Isolants et d’Optronique, Faculté des Sciences, 2 Rue de la Houssinière, Boı̂te Postale 92208, 44322 Nantes Cedex 03, France |
| BookMark | eNqFkE9LAzEQxYNUsK1-BCFHPUQnu9tk9yRS_AeFCuo5ZJOJRNrNkuxW-u3dbfXsaR7D-z1m3oxMmtAgIZccbjhwcfvGc1GxEoBfAVwDwEIwfkKmvJQ5K6Dkk0H_Wc7ILKWv0ZRxMSWv67bzRm9o6nq7p8HRNsTQJ5r8xpvQ0LqPHi391jv87L3FRJ2u44B0w9bFsKUt6_Yt_gHn5NTpTcKL3zknH48P78tntlo_vSzvV8zkIDvmUFojpBRc1qaqC5uXxmImQBqELONOSnBSG1lUVQFiVJkodJ5lFnOuq3xOFsdcE0NKEZ1qo9_quFcc1FiLOtSixp8VgDrUovjA3R05HI7beYwqGY-NQesjmk7Z4P9J-AGZnGxS |
| CitedBy_id | crossref_primary_10_1016_j_apsusc_2006_07_047 crossref_primary_10_1016_j_apsusc_2007_04_056 crossref_primary_10_1063_1_2718886 crossref_primary_10_1080_00387010701429351 crossref_primary_10_1016_j_physe_2008_08_031 crossref_primary_10_1063_1_4766729 crossref_primary_10_1016_j_optmat_2015_10_017 crossref_primary_10_1063_1_4769040 crossref_primary_10_1016_j_jlumin_2006_08_072 crossref_primary_10_1002_pssa_200461207 crossref_primary_10_1016_j_apsusc_2011_06_045 crossref_primary_10_1016_j_tsf_2013_10_183 crossref_primary_10_1364_OE_21_019488 crossref_primary_10_1063_1_1567815 crossref_primary_10_1016_j_optmat_2006_12_003 crossref_primary_10_1016_j_spmi_2017_10_003 crossref_primary_10_1016_j_apsusc_2006_03_083 crossref_primary_10_1016_j_physe_2008_08_042 crossref_primary_10_1088_2040_8986_aad01b crossref_primary_10_1063_1_3043579 crossref_primary_10_1002_pssa_200461118 crossref_primary_10_1021_jp049323y crossref_primary_10_1016_j_optmat_2018_11_038 crossref_primary_10_1002_pssa_200674333 crossref_primary_10_1002_pssa_200461238 crossref_primary_10_1021_cm0500657 crossref_primary_10_1088_1674_1056_abb65c |
| Cites_doi | 10.1016/S0040-6090(96)09488-6 10.1063/1.337036 10.1088/0022-3727/27/6/035 10.1557/PROC-486-107 10.1002/pssb.2221900106 10.1016/0169-4332(96)00094-3 10.1016/0040-6090(95)08075-9 |
| ContentType | Journal Article |
| Copyright | 2001 |
| Copyright_xml | – notice: 2001 |
| DBID | AAYXX CITATION |
| DOI | 10.1016/S1369-8001(00)00056-1 |
| DatabaseName | CrossRef |
| DatabaseTitle | CrossRef |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering |
| EISSN | 1873-4081 |
| EndPage | 361 |
| ExternalDocumentID | 10_1016_S1369_8001_00_00056_1 S1369800100000561 |
| GroupedDBID | --K --M -~X .DC .~1 0R~ 1B1 1~. 1~5 29M 4.4 457 4G. 5GY 5VS 7-5 71M 8P~ AABXZ AACTN AAEDT AAEDW AAEPC AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AAQXK AAXUO ABFRF ABJNI ABMAC ABXDB ABXRA ABYKQ ACBEA ACDAQ ACGFO ACGFS ACNNM ACRLP ADBBV ADEZE ADMUD ADTZH AEBSH AECPX AEFWE AEKER AENEX AEZYN AFFNX AFKWA AFRZQ AFTJW AGHFR AGUBO AGYEJ AHJVU AIEXJ AIKHN AITUG AJBFU AJOXV ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ ASPBG AVWKF AXJTR AZFZN BJAXD BKOJK BLXMC CS3 DU5 EBS EFJIC EFLBG EJD EO8 EO9 EP2 EP3 FDB FEDTE FGOYB FIRID FNPLU FYGXN G-Q GBLVA HVGLF HZ~ IHE J1W JJJVA KOM M41 MAGPM MO0 N9A O-L O9- OAUVE OZT P-8 P-9 P2P PC. Q38 R2- RIG ROL RPZ SDF SDG SDP SES SEW SPC SPCBC SSM SST SSZ T5K UNMZH XFK XPP ZMT ~G- AAXKI AAYXX AFJKZ AKRWK CITATION |
| ID | FETCH-LOGICAL-c307t-fe7dc677617bc9b4d38cde2607ce0221f770f7ac74994067ac7264a322de31a93 |
| ISSN | 1369-8001 |
| IngestDate | Thu Sep 26 19:01:52 EDT 2024 Fri Feb 23 02:30:04 EST 2024 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 5 |
| Keywords | Optical loss Optical waveguide Oxidised porous silicon Near field pattern |
| Language | English |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-c307t-fe7dc677617bc9b4d38cde2607ce0221f770f7ac74994067ac7264a322de31a93 |
| PageCount | 5 |
| ParticipantIDs | crossref_primary_10_1016_S1369_8001_00_00056_1 elsevier_sciencedirect_doi_10_1016_S1369_8001_00_00056_1 |
| PublicationCentury | 2000 |
| PublicationDate | 2000-10-01 |
| PublicationDateYYYYMMDD | 2000-10-01 |
| PublicationDate_xml | – month: 10 year: 2000 text: 2000-10-01 day: 01 |
| PublicationDecade | 2000 |
| PublicationTitle | Materials science in semiconductor processing |
| PublicationYear | 2000 |
| Publisher | Elsevier Ltd |
| Publisher_xml | – name: Elsevier Ltd |
| References | Maiello, LaMonica, Ferrari, Masini, Bondarenko, Dorofeev, Kazuchits (BIB4) 1997; 297 Araki, Takahashi, Koyama, Koshida (BIB5) 1998; 486 Barla, Herino, Bomchil (BIB8) 1986; 59 Berger, Dieker, Thönissen, Vescan, Lüth, Münder, Theiss, Wernke, Grosse (BIB1) 1994; 27 Canham, Cox, Loni, Simons (BIB2) 1996; 102 Halimaoui (BIB7) 1994 Loni, Canham, Berger, Arens-Fischer, Munder, Luth, Arrand, Benson (BIB3) 1996; 276 Halimaoui, Campidelli, Larre, Bensahel (BIB6) 1995; 190 Canham (10.1016/S1369-8001(00)00056-1_BIB2) 1996; 102 Araki (10.1016/S1369-8001(00)00056-1_BIB5) 1998; 486 Loni (10.1016/S1369-8001(00)00056-1_BIB3) 1996; 276 Maiello (10.1016/S1369-8001(00)00056-1_BIB4) 1997; 297 Barla (10.1016/S1369-8001(00)00056-1_BIB8) 1986; 59 Berger (10.1016/S1369-8001(00)00056-1_BIB1) 1994; 27 Halimaoui (10.1016/S1369-8001(00)00056-1_BIB6) 1995; 190 Halimaoui (10.1016/S1369-8001(00)00056-1_BIB7) 1994 |
| References_xml | – volume: 297 start-page: 311 year: 1997 ident: BIB4 publication-title: Thin Solid Films contributor: fullname: Kazuchits – volume: 486 start-page: 107 year: 1998 ident: BIB5 publication-title: Mater Res Soc Symp Proc contributor: fullname: Koshida – start-page: 33 year: 1994 ident: BIB7 publication-title: Porous silicon science and technology contributor: fullname: Halimaoui – volume: 190 start-page: 35 year: 1995 ident: BIB6 publication-title: Phys Stat Sol B contributor: fullname: Bensahel – volume: 59 start-page: 439 year: 1986 ident: BIB8 publication-title: J Appl Phys contributor: fullname: Bomchil – volume: 27 start-page: 1333 year: 1994 ident: BIB1 publication-title: J Phys D contributor: fullname: Grosse – volume: 276 start-page: 143 year: 1996 ident: BIB3 publication-title: Thin Solid Films contributor: fullname: Benson – volume: 102 start-page: 436 year: 1996 ident: BIB2 publication-title: Appl Surf Sci contributor: fullname: Simons – volume: 297 start-page: 311 year: 1997 ident: 10.1016/S1369-8001(00)00056-1_BIB4 publication-title: Thin Solid Films doi: 10.1016/S0040-6090(96)09488-6 contributor: fullname: Maiello – start-page: 33 year: 1994 ident: 10.1016/S1369-8001(00)00056-1_BIB7 contributor: fullname: Halimaoui – volume: 59 start-page: 439 issue: 2 year: 1986 ident: 10.1016/S1369-8001(00)00056-1_BIB8 publication-title: J Appl Phys doi: 10.1063/1.337036 contributor: fullname: Barla – volume: 27 start-page: 1333 year: 1994 ident: 10.1016/S1369-8001(00)00056-1_BIB1 publication-title: J Phys D doi: 10.1088/0022-3727/27/6/035 contributor: fullname: Berger – volume: 486 start-page: 107 year: 1998 ident: 10.1016/S1369-8001(00)00056-1_BIB5 publication-title: Mater Res Soc Symp Proc doi: 10.1557/PROC-486-107 contributor: fullname: Araki – volume: 190 start-page: 35 year: 1995 ident: 10.1016/S1369-8001(00)00056-1_BIB6 publication-title: Phys Stat Sol B doi: 10.1002/pssb.2221900106 contributor: fullname: Halimaoui – volume: 102 start-page: 436 year: 1996 ident: 10.1016/S1369-8001(00)00056-1_BIB2 publication-title: Appl Surf Sci doi: 10.1016/0169-4332(96)00094-3 contributor: fullname: Canham – volume: 276 start-page: 143 year: 1996 ident: 10.1016/S1369-8001(00)00056-1_BIB3 publication-title: Thin Solid Films doi: 10.1016/0040-6090(95)08075-9 contributor: fullname: Loni |
| SSID | ssj0005216 |
| Score | 1.7260306 |
| Snippet | The realisation of optical buried waveguides fabricated from porous silicon layers is presented. The refractive index of porous silicon layer varies according... |
| SourceID | crossref elsevier |
| SourceType | Aggregation Database Publisher |
| StartPage | 357 |
| SubjectTerms | Near field pattern Optical loss Optical waveguide Oxidised porous silicon |
| Title | Optical study of porous silicon buried waveguides fabricated from p-type silicon |
| URI | https://dx.doi.org/10.1016/S1369-8001(00)00056-1 |
| Volume | 3 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://sdu.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1Jb9QwFLaG9gIHRFlEKSAfOICigGeyODlWMNWA2KQWqbfIjp0qVZWJJjPl7_OelzgVCAESlyiy7Fjx-_K2vIWQF7XKEiEkNs0o0jiFbzEui4WIc90wpmUKMgrznVen_PN58W6ZLmcz32QsjP1XSsMY0BozZ_-C2uNDYQDugeZwBarD9Y_o_qW33unBV4sGBRvDXIf2CojeRRJ71Knou7jWF7tW6SFqhDS9gmDUJJv0sfHLugVT7fWT2NpXiHw2UNtFA4bXrzusG7veRL1NPPAC0QYObLAt3o1_UB93fXvDR7sSl21IgjDxi-2wMWHfYZ73TrAxzs25zHzaTIhRQi6b5CWIRjdP27GCJ2DM2v4tnjUnEwRmEzab2KLWTmIntpz7T8LA-iVOx91AZcfO16ZNah7PgwQc4xLNXJxqbKcMzer9BXAwYKD7x--X5x8m0UOmq-747JAc9iZs-JKxV26zX6s9E1Xm7B6562wQemzBc0BmurtP7kwqUz4gXx2MqIERXTfUwog6VFALIxpgRAOMKMKIWhj5BQ_Jt5Pl2dtV7JpvxDWw_W3caK7qnHPQcGVdylQlRa00WL-81qD3zRvOWcNFzcFkBqUQ70C3FiAflE7mokwekb1u3enHhMpcMpllWuWsTGFhuZBlUWNZ9CbN06I5JK_92VS9rbFSjcGHeJgVHmbFsJAtHGY1PySFP8HK4d0qgBWQ_vdLn_z70iNyOyD8Kdnbbnb6Gbk1qN1zh44fN5iGmA |
| link.rule.ids | 315,782,786,27933,27934 |
| linkProvider | Elsevier |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Optical+study+of+porous+silicon+buried+waveguides+fabricated+from+p-type+silicon&rft.jtitle=Materials+science+in+semiconductor+processing&rft.au=Charrier%2C+J&rft.au=Lupi%2C+C&rft.au=Haji%2C+L&rft.au=Boisrobert%2C+C&rft.date=2000-10-01&rft.pub=Elsevier+Ltd&rft.issn=1369-8001&rft.eissn=1873-4081&rft.volume=3&rft.issue=5&rft.spage=357&rft.epage=361&rft_id=info:doi/10.1016%2FS1369-8001%2800%2900056-1&rft.externalDocID=S1369800100000561 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1369-8001&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1369-8001&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1369-8001&client=summon |