Determination of time-of-flight distributions of sputtered oxygen and carbon atoms by resonant multi-photon ionization

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 164-165; pp. 827 - 833
• Main Authors: Goehlich, Andreas, Goehlich, Alexandra, Döbele, H.F
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01-04-2000
• ISSN: 0168-583X; 1872-9584
• DOI: 10.1016/S0168-583X(99)01157-X

In this contribution measurements of time-of-flight (TOF) distributions of sputtered oxygen and carbon atoms obtained at a recently completed set-up are reported. Carbon atoms are released by bombardment of a graphite target by 6 keV argon ions. Atomic oxygen is sputtered from an oxidized titanium foil. In the case of sputtering of the titanium foil also titanium atoms and TiO molecules are detected. For resonant ionization of oxygen and carbon atoms a (2+1) single-color resonant ionization scheme is applied. TOF distributions are measured by delaying the ionizing laser pulse with respect to the ion pulse. The atomic oxygen density is estimated by a comparative measurement with a spectral close two-photon transition of xenon.