Acoustic Resonance Spectroscopy with an Uncalibrated Microwave Path

• Published in: Acoustical physics Vol. 69; no. 1; pp. 40 - 47
• Main Authors: Alekseev, S. G., Luzanov, V. A., Raevsky, A. O., Balashov, V. V., Lopukhin, K. V., Polzikova, N. I.
• Format: Journal Article
• Language: English
• Published: Moscow Pleiades Publishing 01-02-2023; Springer; Springer Nature B.V
• Subjects: Acoustic attenuation; Acoustic properties; Acoustic resonance; Acoustic waves; Acoustics; Aluminum; Multilayers; Nanoparticles; Physical Acoustics; Physics; Physics and Astronomy; Spectrum analysis; Yttrium-aluminum garnet; acoustic absorption; excitation efficiency; HBAR; bulk acoustic wave resonator; calibration; piezoelectric transducer
• ISSN: 1063-7710; 1562-6865
• DOI: 10.1134/S106377102206001X

Acoustic resonance spectroscopy (ARS) is an informative analytical method that yields information about thicknesses and acoustic properties of layers in a multilayer structure representing a high-overtone bulk acoustic wave resonator (HBAR). Since the HBAR spectrum has many resonance features, the development of automatic methods for its processing is an urgent task. In this study, a method for extracting ARS data from a signal distorted by a RF measuring path without additional measurements of reference impedances (calibration) is proposed, which brings the spectrum to a form convenient for automatic processing and significantly expands the range of the ARS application. The method is especially relevant for processing HBAR spectra with a low excitation efficiency. As an example of such processing, the central frequencies and effective widths of more than a thousand resonant peaks are determined and, based on this, the frequency dependence of the acoustic attenuation is established for a new material: optical ceramics based on doped yttrium aluminum garnet nanoparticles.